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High-Aspect-Ratio TGV Electroplating System
CORE PRODUCTS

◎ High-Aspect-Raio TSV Electroplating System (Axtra 30)·High-Aspec-Raio TGV Electroplating System (Supra P500) · Fuly Automated Nickel-Palladium-Gold Plating System

APPLICATIONS

◎ Wafer Fabrication · Advanced Packaging

CERTIFICATIONS & CREDENTIALS

◎ IS0 Cerifications for Quality, Environmental and Occupational Health and Safety Management Systems · CE Certification · Proprietary Patents and Software Copyright Registration Certificates

CORE ADVANTAGES

◎ Void-Free Filling for High-Aspect-Ratio Features:Void-free copper filling up to 15:1 aspect ratio, with within-panel uniformity below 10%

◎ Multi-Anode Electric Field Control:Independent multi-anode control for the center, four sides, and four corners, with precise regulation of pulse forward and reverse currents and an optimized paddle grid design

◎ Turnkey Closed-Loop Solution:Integrated delivery of equipment, proprietary plating chemistry, and process recipes, significantly shortening customer qualification cycles

◎ Dedicated Panel-Level Architecture:Purpose-built vertical electroplating architecture for 510 x 515 mm panels, featuring automatic rack cleaning, lifecycle management, and uptime of at least 95%