◎ High-Aspect-Raio TSV Electroplating System (Axtra 30)·High-Aspec-Raio TGV Electroplating System (Supra P500) · Fuly Automated Nickel-Palladium-Gold Plating System
◎ Wafer Fabrication · Advanced Packaging
◎ IS0 Cerifications for Quality, Environmental and Occupational Health and Safety Management Systems · CE Certification · Proprietary Patents and Software Copyright Registration Certificates
◎ Void-Free Filling for High-Aspect-Ratio Features:Void-free copper filling up to 15:1 aspect ratio, with within-panel uniformity below 10%
◎ Multi-Anode Electric Field Control:Independent multi-anode control for the center, four sides, and four corners, with precise regulation of pulse forward and reverse currents and an optimized paddle grid design
◎ Turnkey Closed-Loop Solution:Integrated delivery of equipment, proprietary plating chemistry, and process recipes, significantly shortening customer qualification cycles
◎ Dedicated Panel-Level Architecture:Purpose-built vertical electroplating architecture for 510 x 515 mm panels, featuring automatic rack cleaning, lifecycle management, and uptime of at least 95%