◎ Wafer Compatibility:Supports 4-inch, 6-inch, 8-inch, and 12-inch wafers

◎ Processing Capacity:13 wafers/cycle, 25 wafers/cycle, 50 wafers/cycle (customizable)

◎ Tank Functions:Circulation, filtration, heating, cooling, throwing, drying, cleaning and other functions

◎ Process Tank Materials:Quartz, PVDF, PTFE, SUS316L, NPP

◎ Piping Materials (Optional):PVDF、PFA、PP、CL-PVC

◎ Circulation Pump Options:WAKI / Pillar / Trebor

◎ Filter Optionss:PALL (USA), Entegris (USA), Cobetter, etc.

◎ Valve Optionss:CKD, Gemu, Kitz, SMC, SEBA, etc.

◎ Touchscreen Optionss:PROFACE, Mitsubishi, SIEMENS, OMRON

◎ PLC Options:Mitsubishi, SIEMENS, OMRON