◎ Wafer Compatibility:Supports 4-inch, 6-inch, 8-inch, and 12-inch wafers

◎ Processing Capacity:Configurable with multiple chambers based on production capacity requirements

◎ 3Cup design:Single-cavity 3Cup design, which can eclipse two metals continuously

◎ Etching Performance:No metal residue after etching; uniformity < 5% for both 8" and 12" wafers

◎ Fragment Rate:Wafer Breakage Rate < 10ppm

◎ Cleanroom Standard:Equipped with FFU (Fan Filter Unit) to maintain CLASS 100 environment

◎ Valve Brands (Optional):CKD, Gemu, Kitz, SMC, SEBA, etc.

◎ Touchscreen Options:PROFACE, Mitsubishi, SIEMENS, OMRON

◎ System Reliability:Uptime ≥ 95%, MTBA > 3 hours, MTBF > 240 hours, MTTR < 4 hours